发明名称 Method and System For Coupling Optical Signals Into Silicon Optoelectronic Chips
摘要 A method and system for coupling optical signals into silicon optoelectronic chips are disclosed and may include coupling one or more optical signals into a back surface of a CMOS photonic chip comprising photonic, electronic, and optoelectronic devices. The devices may be integrated in a front surface of the chip and one or more grating couplers may receive the optical signals in the front surface of the chip. The optical signals may be coupled into the back surface of the chip via one or more optical fibers and/or optical source assemblies. The optical signals may be coupled to the grating couplers via a light path etched in the chip, which may be refilled with silicon dioxide. The chip may be flip-chip bonded to a packaging substrate. Optical signals may be reflected back to the grating couplers via metal reflectors, which may be integrated in dielectric layers on the chip.
申请公布号 US2010111473(A1) 申请公布日期 2010.05.06
申请号 US20090614024 申请日期 2009.11.06
申请人 发明人 PINGUET THIERRY;MEKIS ATTILA;GLOECKNER STEFFEN
分类号 G02B6/34;H01L21/50 主分类号 G02B6/34
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