Industrial device e.g. surface aspect ratio measuring device, has correction device calculating error in position of movable parts and correcting error by movement of recess based on position of movable parts in preset axial direction

摘要

The device i.e. surface aspect ratio measuring device (1) has a control device with a position detector for detecting positions of movable parts and a recess (4). A position controller controls the positions of the movable parts and the recess based on the detected positions with respect to a position reference value. A correction device calculates an error in the position of the movable parts with respect to a biaxial direction and corrects the error by movement of the recess based on the position of the movable parts in a preset axial direction.