发明名称 |
TEST DEVICE, CIRCUIT MODULE, AND MANUFACTURING METHOD |
摘要 |
<p>Provided is a test device including: a test circuit arranged on a test substrate for testing a device to be tested; a sealing portion for covering a region of the test substrate where the test circuit is formed so as to seal the test circuit and define a sealed space filled with a cooling member; and a through connector arranged through the sealing portion for electrically connecting the test circuit to the element arranged outside the sealing portion without using the test substrate.</p> |
申请公布号 |
WO2010050133(A1) |
申请公布日期 |
2010.05.06 |
申请号 |
WO2009JP05395 |
申请日期 |
2009.10.15 |
申请人 |
ADVANTEST CORPORATION;ATAKA, TSUYOSHI;ONO, ATSUSHI |
发明人 |
ATAKA, TSUYOSHI;ONO, ATSUSHI |
分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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