发明名称 TEST DEVICE, CIRCUIT MODULE, AND MANUFACTURING METHOD
摘要 <p>Provided is a test device including: a test circuit arranged on a test substrate for testing a device to be tested; a sealing portion for covering a region of the test substrate where the test circuit is formed so as to seal the test circuit and define a sealed space filled with a cooling member; and a through connector arranged through the sealing portion for electrically connecting the test circuit to the element arranged outside the sealing portion without using the test substrate.</p>
申请公布号 WO2010050133(A1) 申请公布日期 2010.05.06
申请号 WO2009JP05395 申请日期 2009.10.15
申请人 ADVANTEST CORPORATION;ATAKA, TSUYOSHI;ONO, ATSUSHI 发明人 ATAKA, TSUYOSHI;ONO, ATSUSHI
分类号 G01R31/28 主分类号 G01R31/28
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