发明名称 |
Charged-particle optical system with dual specimen loading options |
摘要 |
<p>A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.</p> |
申请公布号 |
EP2182545(A1) |
申请公布日期 |
2010.05.05 |
申请号 |
EP20090174548 |
申请日期 |
2009.10.30 |
申请人 |
FEI COMPANY |
发明人 |
VAN DEN OETELAAR, JOHANNES;HERMKENS, JORN;DONA, PLEUN;NEDERLOF, FRANK;WONDERGEM, WIM |
分类号 |
H01J37/18;H01J37/26 |
主分类号 |
H01J37/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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