Method and apparatus for the delivery of precursor materials

摘要

Vessel and method for the production and delivery of a precursor-containing fluid stream comprising the gaseous phase of a precursor material are disclosed herein. In one aspect, there is provided an vessel (10) comprising: an interior volume (17) wherein the interior volume is segmented into an upper volume and a lower volume wherein the upper volume and the lower volume are in fluid communication; a lid (12) comprising a fluid inlet (22), a fluid outlet (24), an optional fill port (26), and an internal recess wherein at least a portion of the upper volume resides within the internal recess; a sidewall (16) interposed between the lid and a base; and at least one protrusion (34) that extends into the lower volume wherein the precursor is in contact with the at least one protrusion and wherein at least one protrusion extends from at least one selected from the lid, the sidewall, the base, and combinations thereof.