发明名称 |
RETAINING RING WITH SHAPED PROFILE |
摘要 |
<p>Retaining rings with curved surfaces are described. The curved surfaces prevent damage to a fixed abrasive polishing pad when the retaining ring is used in a polishing process. The curved surfaces are on the bottom surface of the ring, such as along the outer diameter and/or along the sidewalls of channels formed in the bottom of the ring.</p> |
申请公布号 |
EP2180977(A1) |
申请公布日期 |
2010.05.05 |
申请号 |
EP20080782048 |
申请日期 |
2008.07.18 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PRABHU, GOPALAKRISHNA B.;YUAN, YIN;OH, JEONGHOON;MENK, GREGORY E. |
分类号 |
B24B37/04;B24B41/06 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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