发明名称 Microsystem comprising a deformable bridge
摘要 The invention relates to a microsystem comprising a deformable bridge, the ends of which are connected to a substrate. According to the invention, at least one actuation electrode, which is solidly connected to the bridge, is disposed between the center of the bridge and one of the ends next to a counter electrode which is solidly connected to the substrate. The electrodes are intended to deform the deformable bridge such that a lower face of the bridge comes into contact with a contact element formed on the substrate.
申请公布号 US7709757(B2) 申请公布日期 2010.05.04
申请号 US20050663737 申请日期 2005.10.11
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 CHARVET PIERRE-LOUIS
分类号 H01H57/00 主分类号 H01H57/00
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