发明名称 Dust-free and pore-free, high-purity granulated polysilicon
摘要 A polycrystalline granulated silicon is made of particles which have a density of greater than 99.9% of the theoretical solid density and therefore have a pore content of less than 0.1% and have a surface roughness Ra of less than 150 nm.
申请公布号 US7708828(B2) 申请公布日期 2010.05.04
申请号 US20040010525 申请日期 2004.12.13
申请人 WACKER-CHEMIE GMBH 发明人 WEIDHAUS DIETER;CROESSMANN IVO;SCHREIEDER FRANZ
分类号 C01B33/02;C01B33/03;B29C41/24;B29C43/22;B29D7/01;C01B33/021;C01B33/027;C30B21/06;C30B27/02;C30B28/10 主分类号 C01B33/02
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