发明名称 Memory elements having patterned electrodes and method of forming the same
摘要 A memory element having a resistance variable material and methods for forming the same are provided. The method includes forming a plurality of first electrodes over a substrate and forming a blanket material stack over the first electrodes. The stack includes a plurality of layers, at least one layer of the stack includes a resistance variable material. The method also includes forming a first conductive layer on the stack and etching the conductive layer and at least one of the layers of the stack to form a first pattern of material stacks. The etched first conductive layer forming a plurality of second electrodes with a portion of the resistance variable material located between each of the first and second electrodes.
申请公布号 US7709289(B2) 申请公布日期 2010.05.04
申请号 US20050111917 申请日期 2005.04.22
申请人 MICRON TECHNOLOGY, INC. 发明人 DALEY JON;BROOKS JOSEPH F.
分类号 H01L21/06 主分类号 H01L21/06
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