发明名称 Position measuring arrangement
摘要 A position measuring arrangement for detecting a relative position is disclosed. The position measuring arrangement includes a reflection scale graduation and a scanning unit having a plurality of optical elements. The plurality of optical elements includes a combining grating, a retro-reflector element, a scanning grating and detector elements. The optical elements are arranged so that light beams and/or partial light beams of a scanning beam path act on the reflection scale graduation at least twice; a directional reversal of the incident partial light beams impinging on the reflection scale graduation perpendicularly with respect to the measuring direction takes place by the retro-reflector element; and a pair of partial light beams impinges in a non-parallel manner on the combining grating, and the combining grating brings the partial light beams impinging on the combining grating to interference, so that phase-shifted signals are detected by the plurality of detector elements.
申请公布号 US7710578(B2) 申请公布日期 2010.05.04
申请号 US20070900268 申请日期 2007.09.11
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 SAENDIG KARSTEN;HOLZAPFEL WOLFGANG
分类号 G01B11/02 主分类号 G01B11/02
代理机构 代理人
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