| 摘要 |
PURPOSE: A liquid source supplying apparatus and a method thereof are provided to reduce production cost by including one module so that a liquid source tank, a circulation line, a retraction line, and a supply line are used commonly. CONSTITUTION: A first chemical line(106) supplies a first chemical solution. A second drug solution line(108) supplies the second drug solution. Pesticide tanks(102, 104) store one or more drug solution. The supply line supplies the drug solution from the pesticide tank to the substrate processing apparatus for processing substrate. The cycle line circulates the drug solution saved in the pesticide tank.
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