| 摘要 |
PURPOSE: An improved roots pump is provided to effectively eliminate powder floated in pumped gas from a pumping space, and to use the roots pump to semiconductor industry. CONSTITUTION: An improved roots pump(100) comprises a stator(110), a pumping space(126), an inlet, an outlet(125), and a channel. The pumping space accepts a pair of multi-lobe rotors(116,117), and has an arch-shaped surface(124). Gas flows into the pumping space through the inlet, and is discharged from the pumping space through the outlet. The channel is located between the arch-shaped surface and the outlet. |
