| 摘要 |
PURPOSE: A measuring device for the size and interval of a hole is provided to increase the precision of a measured value and to increase the convenience of measurement by detecting the movement distance of each stage. CONSTITUTION: A measuring device for the size and interval of a hole comprises a three-axes stage(100), a first scale(140), a second scale(150), a measurement tip(160) and a processing unit(170). The three-axes stage is included of the X-axis stage unit, and the Y-axis stage unit and Z-axis stage unit. The first scale is installed in the X-axis stage unit and detects the translation distance of the X-axis stage unit. The second scale is installed in the Z-axis stage unit and detects the translation distance of the Z-axis stage unit. The measurement tip is connected to the Z-axis stage unit and measurement holder. The processing unit calculates interval between hole by using the barycentric coordinates of the holes.
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