| 摘要 |
PURPOSE: A transfer apparatus of a flexible substrate is provided to minimize a transporting space required for transferring a flexible substrate by erecting the flexible substrate in a vertical direction which is a gravitational direction. CONSTITUTION: A tray(20) is located on the end part of a transfer arm(10). Tray comprises the holder holding the bottom of the flexible substrate(1) and the vacuum absorption part vacuum-absorbing the flexible substrate. It converts the held flexible substrate as described above into the vertical state and tray transfers. Tray comprises the lower part holder(25) and the platform in which the top holder, and holder are included.
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