发明名称 Methods and structures for interconnect passivation
摘要 One or more embodiments of the present invention relate to structures obtained by methods (a) for growing a film by an intermixing growth process, or (b) by depositing a film, which film includes chalcogenides of copper and/or silver (but excluding oxides), such as, for example, copper sulfide (CuSX and/or Cu2SX, where 0.7≦̸X≦̸1.3; and X=1.0 for stoichiometric compounds).
申请公布号 US7709958(B2) 申请公布日期 2010.05.04
申请号 US20050156122 申请日期 2005.06.17
申请人 COHEN URI 发明人 COHEN URI
分类号 H01L23/48 主分类号 H01L23/48
代理机构 代理人
主权项
地址