SYSTEM FOR CONTROLLING FLUID FLOW AND METHOD FOR CONTROLLING FLOW ALARM THEREOF

摘要

PURPOSE: A flux control system and their flow rate method for controlling of alarm control the flow rate alarm by at the same time using the instantaneous flow rate and accumulation flow rate. The minute flux variation can be detected. CONSTITUTION: A processing unit(102) processes substrate. A supply line(108) supplies one or more drug solution. A flow meter(112) measures the instantaneous flow rate of the drug solution at the real-time. A controller(114) produces the mean value of the instantaneous flow rate. Controller produces the accumulation flow rate actually provided to the processing unit.