| 摘要 |
PURPOSE: A high temperature furnace is provided to prevent the damage of a manifold by cooling heat applied to the manifold which is installed in the lower part of a reaction chamber which consists of a furnace. CONSTITUTION: A manifold(100) mediating the external environment of a high temperature furnace and a reaction chamber of the high temperature furnace is located In the lower part of the reaction chamber. A gas supplying pipe(102) which supplies reaction gas in the outside so that the reaction gas is sprayed through a gas injection pipe(104), a gas vent pipe(106), and a cooling part are install in the manifold. The gas vent pipe discharges the reaction gas used for the thermal process to the outside. The cooling part cools the heat delivered from the reaction chamber. The manifold more includes a gas sealing part for sealing hermetically the reaction chamber.
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