发明名称 TRAY TRANSFERRING APPARATUS FOR TEST HANDLER
摘要 PURPOSE: A tray transferring apparatus for a test handler is provided to improve the lifespan of a driving part by installing a driving part in the outside. CONSTITUTION: A gripper(100) is iteratively moved from the inside of a test chamber(TC) to the inside of a de-soak chamber(DC). The gripper holds a tray which a test is completed in the test chamber. One end of a guide part(200) is located within the test chamber and the other end is located within the di soak chamber. The guide part guides the reciprocal movement of the gripper. One end of a link part(300) is connected to the gripper and the other end is installed in the inner wall of the di soak chamber. A driving part(400) is connected to the other end of the link part and circulates the link part.
申请公布号 KR20100045030(A) 申请公布日期 2010.05.03
申请号 KR20080104049 申请日期 2008.10.23
申请人 SECRON CO., LTD. 发明人 KONG, KEUN TAEG;KANG, DONG HO;JOO, JIN CHUL
分类号 H01L21/68 主分类号 H01L21/68
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