METHOD FOR MANUFACTURING FINE CLAD BY SAB(SURFACE ACTIVATED BONDING) PROCESS

摘要

PURPOSE: A method for manufacturing a fine clad by SAB(Surface Activated Bonding) is provided to enable a process at room temperature and to obtain a fine clad with strong electrical characteristics while maintaining a property of a specific material. CONSTITUTION: A method for manufacturing a fine clad by SAB comprises the steps of: loading and fixing first and second metal films in a first chamber(S10), inducing an initial high vacuum of first and second chambers(S20), irradiating plasma to the surfaces of the metal films for surface activation(S50), transferring the metal films to the second chamber(S60), and bonding and low-pressure rolling the metal films(S70).