WAFER TRANSFER ROBOT AND TRANSFER METHOD USING THEREOF

摘要

PURPOSE: A substrate transferring robot and a transferring method thereof are provided to reduce manufacturing costs by executing a loading/unloading operation of a substrate only using a single arm. CONSTITUTION: A robot body(110) comprises an elevating member(111) moving along an elevating shaft in an upward and downward direction. An articulate arm(120) is connected to the one side of the elevating member and is operated in a prescribed direction. The articulate arm is composed of a single structure. A first and second wafer hand(130,140) are connected to the other side of the articulate arm. The first and the second wafer hand execute the scissor movement which is a movement that the wafer hands are other collected or widened each other. A hand lifting unit(200) applies the driving force in a direction which is a direction which the wafer hands are simultaneously collected or widened.