| 摘要 |
PURPOSE: A scriber, a substrate cutting device thereof, and a substrate cutting method thereof are provided to prevent the scribing defect by rapidly discharging heat generated from a vibration head during a scribing process to the outside and maintaining the temperature of the vibration head. CONSTITUTION: A cutting wheel(310) is rotated with being contact with a cutting object. The cutting wheel forms a scribe line(SL) on the surface of the objects. A vibration head(320) is installed on the top of the cutting wheel. The vibration head comprises the unevenness pattern for emitting the heat generated in the inside. The vibration head comprises a megasonic transducer and a cover. A holder(360) clinches the cutting wheel on the vibration head.
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