SEMICONDUCTOR MANUFACTURING EQUIPMENT AND METHOD OF DIRIVNG THE SAME

摘要

PURPOSE: A semiconductor manufacturing facilities and a driving method thereof are provided to easily grasp processing unit based progress situation during run time of a semiconductor manufacturing unit by constituting a Gantt chart in the aspect of the processing unit. CONSTITUTION: A plurality of processing units process a wafer. A control unit(160) controls the operation of the processing unit. The control unit outputs data presenting the operation state of processing units. A display unit(170) displays the operable period of each processing unit along the time by a chart form. The display unit displays the operable period through the Gantt chart. The control unit comprises the logic which controls the display unit in order to displays the Gantt chart in the aspect of the processing units.