APPARATUS FOR PROCESSING ALARM IN SEMICONDUCTOR MANUFACTURING EQUIPMENTS AND METHOD FOR SETTING ALARM

摘要

PURPOSE: An alarm processing apparatus and an alarm setting method thereof are provided to prevent manufacture accidents due to the change of the alarm processing setting by diversifying an alarm setting according to the driving purpose of a semiconductor manufacturing facilities and a network state. CONSTITUTION: At least one module controller(110,112) monitors modules(120,122) in a real time. A facility controller(102) generates an alarm according to the alarm setting if an error is generated from one among the modules. The facility controller processes the alarm setting by dividing the alarm setting into a first and a second mode according to a network state with the module controller. The facility controller comprises a display unit(108) displaying an alarm management program, an alarm list(104), and an alarm management program(106). The alarm list stores a plurality of alarm information due to the error of modules. The alarm management program manages the alarm list and the processing setting of the alarm.