FILM FORMATION APPARATUS AND FILM FORMATION METHOD AND CLEANING METHOD,申请号KR20020079021-传众专利搜索

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发明名称	FILM FORMATION APPARATUS AND FILM FORMATION METHOD AND CLEANING METHOD
摘要
申请公布号	KR100955595(B1)	申请公布日期	2010.05.03
申请号	KR20020079021	申请日期	2002.12.12
申请人		发明人
分类号	H01L21/20;C23C14/04;C23C14/12;C23C14/56;C23C14/58	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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