| 摘要 |
PURPOSE: A reticle transfer robot of an exposure device is provided to prevent exposure operation from being stopped due to vibration by preventing vibration generated during conveying reticles from being transferred to a light exposing unit. CONSTITUTION: A reticle transfer robot of an exposure device comprises a movable part, a gripper(41), and a positioning aligning unit(43). The movable part is moved in X, Y, Z-axis direction, and a rotational direction. The moving part transfers reticle(1) loaded in a cassette of a light exposure device to a wheel. A gripper for fixing the reticle is installed at the upper end of the movable part. The positioning aligning unit is integrated with one side of the gripper. The positioning aligning unit aligns the location of the reticle placed on the wheel.
|
