| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-modified substrate provided with a modifying layer disposed on the surface of the substrate through a light-non-transmitting layer, to provide a method for efficiently producing the same without relating to a use thereof, and to provide a system for producing the same. SOLUTION: There is provided the method for producing the surface-modified substrate 1, includes a step of coating the substrate surface 11a with a modifying agent to provide a modifying layer 13, a step of exposing prescribed sites of the modifying layer 13 to pattern a photoresist layer 14 on the modifying layer 13, a step of removing the exposed modified layer 13 to expose prescribed sites of the substrate surface 11a, a step of etching the exposed substrate surface 11a to form dents 110 in the substrate surface 11a, and a step of removing the photoresist layer 14 left on the substrate 11. COPYRIGHT: (C)2010,JPO&INPIT |
