| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of preventing a keyboard from being broken by warning that a test head turns while the keyboard is open. Ž<P>SOLUTION: The semiconductor inspection device includes: an inspection processing means having a construction in which the test head is turned by a head turning device to be opposed to the side of a prober and an operation means in use interferes with a turning area of the test head; and a control means by which a turning permission signal is output to the head turning device when the operation means is housed, and the turning permission signal is not output thereto when the operation means is not housed. The semiconductor inspection device further includes a horizontal sensor 18 disposed on the test head for transmitting a signal indicating whether the test head is horizontal, and an alarm means for transmitting an alarm signal responsive to the signal from the horizontal sensor indicating that the test head 17 is not horizontal while the turning permission signal is not output. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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