摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated piezoelectric actuator which does not cause characteristic deterioration caused by a crack or the like even if used over a long period of time in a severe environment. <P>SOLUTION: The laminated piezoelectric actuator 10 includes external electrodes 20 and 26 provided on end surfaces of a laminate 12 in which a plurality of internal electrodes 16 and 18 are formed in a piezoelectric element (piezoelectric body) 14 alternately across the piezoelectric body. Each of the external electrodes 20 and 26 includes a plurality of bed metal layers 22, 28 connected to leading parts 16A, 18A of the internal electrode 16, 18, respectively, and a conductive elastic body layer 24, 30 mutually connecting with the plurality of bed metal layers 22, 28. The external electrodes 20 and 26 are formed into a two-layer structure, whereby the stress applied on the external electrodes 20 and 26 is reduced. Furthermore, since the external electrodes 20 and 26 can satisfactorily follow element displacement by the elastic body layers 24 and 30, the characteristic deterioration of the laminated piezoelectric actuator 10 by a crack or the like can be prevented. <P>COPYRIGHT: (C)2010,JPO&INPIT |