FILTER DEVICE, ILLUMINATING SYSTEM, EXPOSURE APPARATUS, AND MANUFACTURING METHOD OF DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a filter device which can control illuminating light radiated to an object to achieve a desired illumination distribution.

SOLUTION: The filter device includes: a filter element to change the incident light intensity depending on the incident angle and position; and a filter driver to change at least either the incident angle or incident position of the entering light by moving the filter element with respect to the light incident to the filter element.

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