| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress deterioration of a workpiece strength after forming a modified layer without damaging the quality of the workpiece divided along a predetermined dividing line. <P>SOLUTION: This relates to a method of dividing a tabular workpiece. In a method of forming the modified layer, the modified layer 22 including an intersection with a second dividing line 3 with the length of 90-95% to an interval divided by the second dividing line 3 is formed on a first dividing line 2, and also the modified layer 22 including the intersection with a first dividing line 2 with the length of 90-95% to the interval divided by the first dividing line 2 is formed on the second dividing line 3. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
