| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide in which tight contact can be improved between a wiring board and the optical waveguide stuck to the wiring board with an adhesive. SOLUTION: On a supporting body 33, there are successively stacked a first cladding layer 17, a core part 18, and a second cladding layer 19 to form a layered body 15. Then, where a surface 33B of the supporting body 33 on the side with no layered body 15 formed is oppositely faced with the upper face 41A of an abrasive member 41, both ends of the layered body 15 and the supporting body 33 are ground with an abrasive member 41, forming slopes 21A, 21B, 48, 49 on both ends of the layered body 15 and the supporting body 33. Subsequently, in a manner that the upper face 53A of a stage 53 of a film forming apparatus and a second cladding layer 19 come in contact with each other, an optical waveguide body 11 formed on the supporting body 33 is placed on the stage 53, with a metallic film 54 formed on the slopes 21A, 21B by the film forming apparatus to produce mirrors 12, 13. Thereafter, the supporting body 33 is removed from the optical waveguide body 11. COPYRIGHT: (C)2010,JPO&INPIT |
