| 摘要 |
PROBLEM TO BE SOLVED: To separate an active layer from a mismatch failure of a bonded interface. SOLUTION: A layer 1 with high-concentration impurities and a layer 2 with low-concentration of impurities are bonded, and by subjecting it to fixing and heat treatment, the layer 1 is diffused to the layer 2, with low impurities concentration, thus forming a diffusion layer 3 with high-concentration impurities; the impurities form a trench 11, ranging from the lightly-doped layer 2 to the heavily-doped diffusion layer 3; and the impurities form a layer 12 along the trench 11 that communicates with the lightly-doped layer 2 and the heavily-doped diffusion layer 3, and thereby the trench 11 and the layer 12 alongside it are arranged, separated away from the bonded interface A1 of the layer 1 and the layer 2. COPYRIGHT: (C)2010,JPO&INPIT |
