PROBE CARD

摘要

PROBLEM TO BE SOLVED: To provide a probe card for collectively inspecting a large number of circuit chips without having to increase the number of output terminals of a tester apparatus. SOLUTION: The probe card includes: a plurality of cut-off elements provided for each contact probe 11 for cutting off signals transmitted from a first terminal to contact probes 11; a cut-off control means for alternatively transmitting signals input to the first terminal to the contact probes 11; a main substrate 10 in which each contact probe 11 is formed in one principal surface; and a plurality of raised substrates 13 in a raised state mounted to the other principal surface of the main substrate 10. The cut-off control means includes a control circuit for controlling each cut-off element on the basis of signals input from the tester apparatus 30 to a second terminal different from the first terminal. The control circuit is arranged on each raised substrate 13 to control a larger number of cut-off elements than the second terminal. COPYRIGHT: (C)2010,JPO&INPIT