| 摘要 |
<P>PROBLEM TO BE SOLVED: To inspect a top position, or the like within an interference range and to measure height in real time (within one frame), and to remove the influence of external vibration by electric signal processing. Ž<P>SOLUTION: A three-dimensional shape inspection apparatus including a white interferometer using a time correlation image sensor (camera 10) includes: a means (displacement sensor 42) for acquiring a vibration displacement where an object 8 to be measured is vibrated by an external environment; and a means (reference signal generation means 50) for synthesizing the vibration displacement into a reference signal given to the time correlation image sensor for canceling the influence of external vibration. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
