发明名称 |
METHODS FOR INTRODUCTION OF A REACTIVE MATERIAL INTO A VACUUM CHAMBER |
摘要 |
Methods for the introduction of a reactive material into a vacuum chamber while minimizing or eliminating the simultaneous introduction of contaminating materials or substances. As a result, contaminating materials and substances that can interfere with any measurements or other processes that occur in the vacuum chamber are minimized or eliminated.
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申请公布号 |
CA2684142(A1) |
申请公布日期 |
2010.04.30 |
申请号 |
CA20092684142 |
申请日期 |
2009.10.29 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
TOUCHBERRY, ALAN BRUCE;STARK, TERRY DEAN |
分类号 |
B01J4/00;B01J3/03 |
主分类号 |
B01J4/00 |
代理机构 |
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