THE APPARATUS FOR ALIGNING OF THE CASSETTE FOR THE EXPOSURE EQUIPMENT

摘要

PURPOSE: An apparatus for aligning of a cassette for an exposure apparatus is provided to improve the position accuracy of a glass by minimizing the fluctuation and displacement of the cassette. CONSTITUTION: A cassette(10) is arranged in the interior of a frame(11). A glass(1) is loaded in the cassette. A glass transporting robot(20) transfers the glass to the exposure apparatus. A position alignment groove(13) is depressed in the bottom of the cassette. The position alignment groove allows a micro position control of the cassette. A location alignment block(30) is inserted into the position alignment groove. The location alignment block transfers the location of the cassette.