| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator which is manufactured by a simple manufacturing method, less deviating laterally, and having a long life. SOLUTION: The actuator 1 has a base 2 and a microstructure 3 fixed to the base 2. Further, it has a first and second supports 4, 5 both facing the microstructure 3, a turn plate 7 connected to the first supports 4 through V-shaped elastic joints 6 in a manner free to turn and floating on the base 2, comb-shaped movable electrode groups 11 provided at the edges of the turn plate 7, fixed sections 9 connected to the second supports 5 through spring sections 8 and fixed to the base 2, comb-shaped electrode groups 10 provided at the edges of fixed sections 9 and engaging with the movable electrode groups 11, and positioning sections 14 positioning the base 2 and the microstructure 3. The fixed sections 9 including fixed electrode groups 10 are thinner than the second supports 5, moved to the location lower than the turn plate 7 having the movable electrode groups 11 by its own weight and deformation of the spring sections 8 and are fixed to the base 2. The movable electrode groups 11 are located higher than the fixed electrode groups 10. COPYRIGHT: (C)2010,JPO&INPIT
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