| 摘要 |
PROBLEM TO BE SOLVED: To provide a slip detection method and a detection device for a film on a carrier roller generated when forming the film, and a film forming device for preventing the occurrence of a slip, by restraining the occurrence of the slip, by controlling a condition such as tension applied to the film in carrying, by monitoring a carrying state of the film in a film forming process based on a detection result of this slip. SOLUTION: This film slip detection method is used for a film carrying device for carrying a film having a conductive coating film on a surface via at least two rollers. The film slip detection method is characterized in that the mutually electrically insulated two rollers detect a film slip state caused in any or both of the two rollers from a change in an electric current value flowing in the conductive coating film between the two rollers or a change in an electric resistance value by adopting an electric continuous state through the contact with the conductive coating film. COPYRIGHT: (C)2010,JPO&INPIT
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