| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diamond electrode that can be readily manufactured and has stable characteristics in a diamond electrode having a hydrophilic region at one portion of the surface, and to provide a chemical sensor that uses the diamond electrode and a method of manufacturing the chemical sensor. <P>SOLUTION: By etching the surface of a conductive diamond plate 1 with oxygen plasma for a prescribed amount of time, the hydrophilic region 3 is formed on the surface of the conductive diamond plate 1, where needle-like projections 30 are arranged regularly at a high density. An insulating layer 9 and electrodes 5, 7 are successively formed on the surface of the hydrophilic region 3 by lift-off, thus obtaining the chemical sensor. The chemical sensor has the hydrophilic region 3, having a needle-like projection arrangement structure on the surface of the conductive diamond plate 1, can hold a solution subjected to electrochemical measurement, or the like, while swelling in a waterdrop shape on the surface of the hydrophilic region 3, thus easily executing electrochemical measurements, or the like to the solution, or the like. <P>COPYRIGHT: (C)2010,JPO&INPIT |
