| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly accurately measure relative position relationship of a straight line and a scan direction connecting measuring positions of a plurality of sensors. Ž<P>SOLUTION: (a) A posture measuring method advances side by side and moves measuring positions of first and second sensors for measuring change of a surface height direction in a plane along a step pattern composing at least a part of one circumference and straight lines intersected with two parts by moving the measuring positions on the surface of an evaluation object. The measuring positions of the first and second sensors obtain information of in-plane positions intersected with the step pattern. (b) The posture measuring method obtains relative position relationship of the straight lines connecting the measuring position of the first sensor and the measuring position of the second sensor and directions of advancing side by side and moving on the basis of the obtained information. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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