| 摘要 |
PROBLEM TO BE SOLVED: To provide a manipulator system which, while being a trackless type suitable for miniaturization, avoids a problem with cycle times for operations and the problem of complicated control of movement positions, such as with a self-propelled carrier, and which achieves workpiece transportation, movement to access positions, and the like with high accuracy and quickness over a wide range, with low spcifications. SOLUTION: A base 9, whose position relative to peripheral units 7A-7E and the like is fixed, is disposed on the periphery of an area 3 in which the peripheral units 7A-7E and the like are arranged. A macro manipulator 13 provide with a parallel link mechanism is installed so as to hang between a follower carrier 11, which travels on a floor 3A of the area 3 by being applied with an external force, and the base 9. The macro manipulator 13 moves the follower carrier 11 to travel among the individual peripheral units 7A-7E on the floor 3A, and an articulated micro manipulator 15 installed on the follower carrier 11 accesses each peripheral unit 7A-7E or the like or moves a workpiece 5 in process. COPYRIGHT: (C)2010,JPO&INPIT
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