| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that, although an evaporation mask can be enlarged in area by arranging a plurality of individual masks with glass as a support substrate, exfoliation charging occurs between an individual mask and the evaporation substrate when they are separated after an evaporation process, ensuing discharge between the individual mask and the evaporation substrate, so that TFTs provided in the evaporation substrate, light-emitting parts of an organic EL device or the like are destroyed, leading to degradation of characteristics of the evaporation substrate. Ž<P>SOLUTION: The evaporation mask 100 is provided with individual masks 101, a support substrate 102, a frame 103, and conductive regions 104. The support substrate 102, endowed with a function of supporting the individual masks 101, is structured of hard glass. The conductive regions 104 are so arranged to be electrically connected with the individual masks 101 as well as with the conductive frame 103 via the support substrate 102, so that static charge due to the exfoliation charging is guided from the individual masks 101 to the evaporation substrate to prevent damage of the evaporation substrate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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