| 摘要 |
AN APPARATUS FOR PROCESSING A SUBSTRATE (108) WITH A FLUID MENISCUS TO BE APPLIED TO A SURFACE OF THE SUBSTRATE IS PROVIDED WHICH INCLUDES A DOCKING SURFACE (120A) CONFIGURED TO BE PLACED ADJACENT TO AN EDGE OF THE SUBSTRATE WHERE THE DOCKING SURFACE IS IN THE SAME PLANE AS THE SUBSTRATE. THE DOCKING SURFACE PROVIDES A TRANSITION INTERFACE TO ALLOW THE FLUID MENISCUS TO ENTER AND EXIT THE SURFACE OF THE SUBSTRATE.
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