| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of obtaining an irradiation dose for which a proximity effect is corrected more highly accurately. <P>SOLUTION: The drawing apparatus 100 of one embodiment includes: an irradiation dose calculation part 112 for determining the irradiation dose by solving the equation of storage energy by backscattering of a charged particle beam defined by a polynomial having the term of at least second order of the irradiation dose; and a drawing part 150 for drawing a pattern on a sample 101 by irradiation with an electron beam 200 by the determined irradiation dose. Drawing is executed by the irradiation dose with which the proximity effect is corrected more highly accurately. <P>COPYRIGHT: (C)2010,JPO&INPIT |
