| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of cleaning an object to be cleaned capable of reliably discharging a foreign substance which is removed from the object to be cleaned to the outside of a cleaning tank body 1 and preventing re-sticking of the foreign substance, in the cleaning of the object to be cleaned in which the object to be cleaned such as a component, a product or the like is immersed into cleaning liquid and is cleaned. SOLUTION: In the method of cleaning the object to be cleaned, a plurality of through-holes 11a, 12a which make a cleaning liquid (m) pass through are disposed, on each of a pair of first inner wall 11 and second inner wall 12 opposite to each other among inner walls of the cleaning tank body 1, at prescribed intervals nearly over the whole of the inner walls, the cleaning liquid (m) is introduced into the cleaning tank body 1 via the through-hole 11a, the cleaning liquid (m) is discharged to the outside of the cleaning tank body 1 through the through-hole 11b, thereby, the cleaning liquid (m) is caused to flow in the state of laminar flow nearly in the horizontal direction toward the second inner wall 12 from the first inner wall 11, and the object (b) to be cleaned is arranged in the middle of the laminar flow and the cleaning is performed. COPYRIGHT: (C)2010,JPO&INPIT
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