LASER WORKING METHOD, LASER WORKING APPARATUS, AND ITS MANUFACTURING METHOD

摘要

A working object (1) is irradiated with a laser beam (L), which is to be concentrated in a working object (1) and which has been modulated by a reflection type spatial light modulator (203) such that its aberration may be at a predetermined aberration or less. As a result, the aberration of the laser beam (L) that occurs at a position where the collecting point (P) of the laser beam (L) is aligned is minimized to enhance the energy concentration of the laser beam (L) so that a modifying region (7) having a high function as the starting point of a cutting operation can be formed. Since the reflection type spatial light modulator (203) is used, moreover, the using efficiency of the laser beam (L) can be improved better than that of a transmission type spatial light modulator. This improvement in the using efficiency of the laser beam (L) is important especially in case the modifying region (7) for the cut starting point is formed in the plate-shaped working object (1).