CALIBRATION SYSTEMS AND METHODS FOR TRACER GAS LEAK DETECTION

摘要

Tracer gas leak detection is provided by a calibration system with a gas leak detector having a test port for receiving a sample containing a tracer gas and coupled to a vacuum pump; a calibrated leak for a calibration sample containing the tracer gas; a mass filter coupled to the test port for receiving the test sample in an operating mode, coupled to the calibrated leak through a calibrated leak valve for receiving the calibration sample in a calibration mode, having controllable transmission of the tracer gas and providing a filtered sample; detector detecting the tracer gas in the filtered sample; a programmable gain element providing a measured value of leak rate in response to the detector signal; and a controller configured, in response to a mode control signal, to operate the leak detector in the calibration mode over two or more working ranges using the calibrated leak.