| 发明名称 |
METROLOGY OF THIN FILM DEVICES USING AN ADDRESSABLE MICROMIRROR ARRAY |
| 摘要 |
An addressable micromirror array is employed in conjunction with circuit topology navigation software to rapidly wavelength sample selected measurement points in an integrated circuit region.
|
| 申请公布号 |
US2010106456(A1) |
申请公布日期 |
2010.04.29 |
| 申请号 |
US20090388173 |
申请日期 |
2009.02.18 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GENIO EDGAR;BUDIARTO EDWARD W. |
| 分类号 |
G01J3/40;G06F15/00 |
主分类号 |
G01J3/40 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
