发明名称 NITRIDE SEMICONDUCTOR DEVICE
摘要 <p>A nitride semiconductor device comprising: a first nitride semiconductor layer (13); a second nitride semiconductor layer (14) formed on the first nitride semiconductor layer (13) and having a larger band gap than the first nitride semiconductor layer (13); a source electrode (21), drain electrode (22) and gate electrode (23) formed on the second nitride semiconductor layer (14); a high-resistance layer (11) formed below the first nitride semiconductor layer (13); a conductive layer (32) formed in contact with the lower side of the high-resistance layer (11); a lower insulating layer (35) formed below the conductive layer (32); and a bias terminal (31) electrically connected to the conductive layer (32).</p>
申请公布号 WO2010047030(A1) 申请公布日期 2010.04.29
申请号 WO2009JP04125 申请日期 2009.08.26
申请人 PANASONIC CORPORATION;TSURUMI, NAOHIRO;NAKAZAWA, SATOSHI;UEDA, TETSUZO 发明人 TSURUMI, NAOHIRO;NAKAZAWA, SATOSHI;UEDA, TETSUZO
分类号 H01L21/338;H01L21/3205;H01L23/52;H01L29/778;H01L29/812 主分类号 H01L21/338
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