Light reflected from respective image elements of a workpiece is channeled through respective light channeling elements to respective locations of a spectrographic light disperser. Spectral distributions of the respective image elements produced by the spectrographic light disperser are recorded. A processor groups similar spectral distributions into respective groups of mutually similar distributions, and classifies the groups by the number of distributions contained in each group.
申请公布号
WO2010048554(A2)
申请公布日期
2010.04.29
申请号
WO2009US61919
申请日期
2009.10.23
申请人
APPLIED MATERIALS, INC.;HOLDEN, JAMES, MATTHEW;GENIO, EDGAR;EGAN, TODD, J.
发明人
HOLDEN, JAMES, MATTHEW;GENIO, EDGAR;EGAN, TODD, J.